Accurate control of the gas flow rate into the vacuum chamber per unit time.
Wide range of flow controlIntegrated shut-off valveCan be closed without losing the flow setting.
Nominal diameter | inch | The main material | flange | drive | Part number |
DN10 (Coarse Gas Metering) | 1/2 | aluminium | ISO-KF | Manual | 07060101 |
DN16 (Accurate Gas Metering) | 5/8 | stainless steel | ISO-KF | Manual | 07060201 |
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